| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb5143c5d291d49c700ac1631bdd20df |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-34 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B19-01 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2000-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57d10e165e4e8f154f4a273fee577bdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_284ab1a684a53552a72caadbc1d05ab3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_defbff11d898df8dbd55eb6a7d7666bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c1a3186ef9982494127cbe7ae5bdefc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1282d22eaf512df87afd04be64dc7f21 |
| publicationDate |
2002-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002137927-A |
| titleOfInvention |
Quartz glass and quartz glass jig excellent in plasma corrosion resistance, and methods for producing them |
| abstract |
[PROBLEMS] To provide a quartz glass and a quartz glass jig excellent in plasma corrosion resistance, particularly corrosion resistance to an F-based plasma gas, as a jig material for a plasma reaction used in semiconductor manufacturing, and a method of manufacturing the same. . Kind Code: A1 A quartz glass containing a metal element and having increased plasma corrosion resistance, wherein the content of bubbles and foreign matter in the quartz glass is less than 100 mm 2 in a projected area per 100 cm 3 . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7661277-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002356347-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1344752-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7365037-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008535764-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006306675-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006038349-A1 |
| priorityDate |
2000-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |