| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-1545 |
| filingDate |
2000-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51fa0ce4d4abeeaeb492059877858d89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02602d7bf4a6b83c0a7c1feabedae8f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50f4a97d049df833ff4c1ad182ea4d9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99bdff9aa47d25894f4e6e415f25ea71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad60b78d1616f3cba147e2333490c4a0 |
| publicationDate |
2002-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002131909-A |
| titleOfInvention |
Ionizing radiation resist compositions and methods of use |
| abstract |
(57) [Problem] To provide an ionizing radiation resist composition having improved resolution while maintaining sensitivity. SOLUTION: The ionizing radiation resist composition comprises (a) an acid generator which generates an acid upon irradiation with ionizing radiation; A resist material which is alkali-soluble and insoluble in an alkali developer due to the presence of an acid; and (c) ester dissociation occurs in the alkali developer to release at least one of a carboxyl group, a sulfonic acid group and a phosphoric acid group. Additives. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I637971-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10281818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2415790-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10303052-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2415790-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004102275-A1 |
| priorityDate |
2000-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |