| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62ba4922d4578dfe4c14224f4bc940e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2000-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14a99f4b7f319f04fdf0457910e87c80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7235a4795b3ff93a6f9ceca0708595
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_652c347e75aa90465b8f31f6feb91833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed6d87a3242df7b3f1d103a0661ddf0d |
| publicationDate |
2002-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002110565-A |
| titleOfInvention |
Plasma processing apparatus and processing method, and semiconductor device manufacturing method |
| abstract |
(57) Abstract: In a plasma processing apparatus, self-cleaning of an inner wall of a chamber or plasma processing such as precoating can be efficiently performed. SOLUTION: The plasma generation source 2 and the plasma generation source 2 And a plurality of magnetic field generating means 7a and 7b, and magnetic field controlling means 14a14b for independently controlling the magnetic field of each magnetic field generating means 7a and 7b. Have at least the function of reversing the direction of the magnetic field. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012131888-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10458044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9738992-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8662010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009529225-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008135393-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012089886-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101336479-B1 |
| priorityDate |
2000-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |