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filingDate 2000-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2002-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002075062-A
titleOfInvention Transparent conductive film
abstract (57) [Summary] [Object] By co-adding cobalt (Co) or vanadium (V) simultaneously with at least one kind of donor impurity to zinc oxide (ZnO), visible light transmittance and electric resistivity are significantly impaired. It is an object of the present invention to provide a new impurity-codoped ZnO transparent conductive film, a target material used for manufacturing the thin film, and a patterning technique for the purpose of easily controlling the chemical characteristics of the ZnO-based transparent conductive film without the need. . The object of this invention is to provide ZnO with at least one or more kinds of donor impurities (for example, ZO using Al 2 O 3 powder as a raw material). about 3 atomic% of Al with respect to n) and cobalt chloride (CrCl 2 ) or vanadium oxide (V 2 O 5 ) powder as a raw material; This can be achieved by a transparent conductive film formed by forming an impurity-codoped ZnO film containing 1 to 5 atomic%.
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