abstract |
PROBLEM TO BE SOLVED: To provide a polyester film for a dry film resist, which satisfies transparency, in particular, light transmittance near a wavelength of 365 nm, slipperiness, winding property, resolution, and recyclability. SOLUTION: This is a biaxially stretched polyester film having a thickness of 10 μm or more and 25 μm or less, wherein the haze value of the film is 3% or less, the polycondensation metal catalyst residue of the polyester is less than 150 ppm, and antimony metal is contained. A polyester film for a dry film resist, which is 15 mmol% or less based on all acid components. |