| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-638
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2000-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d04a0b7a8d45ddb70b8076561dc1a5c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c30504355182b93f041bcebc2e0211bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23f9d50573796c9710483ac7cb70af03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c089920f6dc5873cd5a6465ce023f50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_188817413db39230d060d710688b660e |
| publicationDate |
2002-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2002029830-A |
| titleOfInvention |
Plasma resistant member and method of manufacturing the same |
| abstract |
PROBLEM TO BE SOLVED: To provide a plasma-resistant member which can sufficiently withstand low-pressure high-density plasma exposure and a method for manufacturing the same. SOLUTION: The invention of a plasma-resistant member is substantially composed of a sintered body of yttrium aluminate garnet and has an L * a * b having a surface roughness (Ra) of 0.01 μm or less. * The color difference in the color system is 70 or more. The invention of the production method includes a step of calcining and degreasing the yttrium aluminate garnet-based molded body, and vacuum-sintering the calcined and degreased molded body to introduce defects into oxygen ion sites in the crystal to blacken it. And heat-treating the blackened sintered body in an air atmosphere at a temperature of 1400 to 1900 ° C. to bond oxygen to oxygen-deficient ion sites in the crystal to whiten. I do. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011151336-A |
| priorityDate |
2000-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |