| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-60 |
| filingDate |
1997-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2001-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001500982-A |
| titleOfInvention |
Aqueous coating material for anti-reflective coating for photoresist composition |
| abstract |
(57) [Summary]nThe present invention relates to a novel aqueous coating material for an antireflection film and a method of using the same for photolithography. The anti-reflective coating material comprises a novel polymer and water, wherein the novel polymer of the anti-reflective coating material comprises at least one unit containing a dye absorbing about 180 nm to about 450 nm, a crosslinkable group. And at least one unit derived from a hydrophilic vinyl monomer or a vinyl monomer capable of becoming hydrophilic. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019198792-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007113014-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2019198792-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000187331-A |
| priorityDate |
1996-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |