| abstract |
(57) [Abstract] (with correction) [PROBLEMS] PCT (Presure Cooker Tes) is used as an interlayer insulating film material in a semiconductor device or the like. t), relative permittivity characteristics after CMP, and CMP (Chemi after PCT). A film-forming composition capable of forming a silica-based film having excellent resistance to cal mechanical polishing and excellent adhesion to a substrate after PCT is obtained. (A) One or more compounds selected from the group of compounds represented by the general formulas 1, 2, and 3 are selected from tetraalkylammonium hydroxides, aliphatic cyclic amines, and metal hydroxides. A film-forming composition comprising the compound of formula (I) and a compound hydrolyzed and shrunk in the presence of water, and (B) an organic solvent. R a Si (OR 1 ) 4-a ... (1) Si (OR 2 ) 4 ... (2) R 3 b (R 4 O) 3-b Si- (R 7 ) d -Si (OR 5 ) 3-c R 6 c ยทยท (3) (R is H or F atom or monovalent organic group, R 1 to R 6 are monovalent organic group, R 7 is O atom, phenylene group or-( C H 2 ) n- , a is 1-2, b and c are 0-2, d is 0 Or 1, n shows 1-6. ) |