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publicationDate 2001-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2001338909-A
titleOfInvention Method for etching organic film, method for manufacturing semiconductor device, and method for forming pattern
abstract (57) Abstract: In a method for etching an organic film, a cross section of a concave portion formed in the organic film has a forward tapered shape. SOLUTION: A plasma generated from a mixed gas of a gas mainly containing a compound containing carbon, hydrogen and nitrogen, for example, a methylamine gas, and a gas containing a nitrogen component, for example, a nitrogen gas is used for an organic film. Perform etching.
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