http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001338906-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-52 |
| filingDate | 2000-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c140bde165dc8298fe42ba69ad5dd6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe5ea923691ddf51f74b34b3731ef63b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10f3d56f706d8186ec3ed44ac146c8dd |
| publicationDate | 2001-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001338906-A |
| titleOfInvention | Glassy carbon chamber liner |
| abstract | (57) [Problem] To prevent the metal contamination and generation of particles from the chamber liner itself when the chamber liner is consumed by plasma, and to secure the function required for the glassy carbon chamber liner. The present invention provides a glassy carbon chamber liner capable of relatively easily obtaining a cylindrical shape having high roundness. SOLUTION: In a chamber inner wall protecting member (hereinafter referred to as a chamber liner) used in a plasma etching apparatus, a portion exposed to plasma is glassy carbon alone, and a portion in contact with the chamber inner wall is a glassy material to which an inorganic conductive filler is added. Glassy carbon chamber liner made of carbon composite. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100916952-B1 |
| priorityDate | 2000-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.