http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001319964-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2000-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0665033e79cda0a9c8bb5ac2e2fba21 |
| publicationDate | 2001-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001319964-A |
| titleOfInvention | Semiconductor manufacturing and inspection equipment |
| abstract | (57) [Summary] [Problem] Even if the temperature of a ceramic substrate is increased, a ceramic substrate fitted into a support container does not tilt, and can uniformly heat an object to be heated. Provided is a semiconductor manufacturing / inspection apparatus capable of appropriately performing processing. SOLUTION: A ceramic substrate provided with a resistance heating element composed of one or two or more circuits, a substantially cylindrical outer frame portion and an annular substrate receiving portion provided on an upper inside of the outer frame portion are provided. It comprises a supporting container configured to include, and a heat insulating ring having a plurality of notches in a part of the upper surface, wherein the ceramic substrate is fitted into the supporting container via the heat insulating ring. Semiconductor manufacturing and inspection equipment. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102361396-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017033999-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210130458-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007201484-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7855569-B2 |
| priorityDate | 2000-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.