http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001279174-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D179-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D171-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D125-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D179-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-30 |
| filingDate | 2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab290ed5c72b2f1a5a9caef696a4f56d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef12da99ea28712494827299777fbc7c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_254466728ea82d9c3b06c1d279577340 |
| publicationDate | 2001-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001279174-A |
| titleOfInvention | Coating varnish for insulating film and insulating film |
| abstract | PROBLEM TO BE SOLVED: To provide a heat-resistant insulating film having excellent thermal characteristics, electric characteristics, physical characteristics, and mechanical characteristics in a semiconductor application, and particularly having a very low dielectric constant. (1) One or more polybenzoxazole precursors having a repeating unit represented by the general formula (A), and (2) a thermal decomposition temperature of 200 ° C to 400 ° C. (C) an organic compound, and (3) the above (1) and (2) A coating varnish consisting of an organic solvent capable of simultaneously dissolving is prepared and formed into a film. (General formula A In the formula, n represents an integer from 0 to 1000, X represents a group selected from the structures represented by the formula (B), Y represents the formula (C), and Z represents the group represented by the formula (D). ) |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001354852-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012530789-A |
| priorityDate | 2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 114.