| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c35eb91647677291246e34e21debe8ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4e8e93b7561d594047494d0df4b6462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a27a7416b7e5f70bf2f396896851c36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b16e799368cf7527d07fce2f2282a765 |
| publicationDate |
2001-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001274157-A |
| titleOfInvention |
Semiconductor device manufacturing method and apparatus |
| abstract |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a semiconductor element having a film and an interface with few defects and having improved characteristics and reliability. SOLUTION: This manufacturing method includes an oxide film forming step of supplying neutral active species or oxygen atoms of oxygen to the surface of a semiconductor substrate, and a carbide removing step of supplying ozone. Thereafter, a silicon-containing material and a neutral active species of oxygen or oxygen atoms are supplied to form a silicon oxide film, thereby manufacturing a semiconductor element. An apparatus therefor is also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2003047000-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9460913-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4647211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101759157-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102534615-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7816688-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03047000-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012138500-A |
| priorityDate |
2000-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |