http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001257196-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-02 |
| filingDate | 2000-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 |
| publicationDate | 2001-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001257196-A |
| titleOfInvention | Ceramic substrate for semiconductor manufacturing and inspection equipment |
| abstract | (57) [Problem] To provide a ceramic substrate for a semiconductor manufacturing / inspection apparatus which is hardly deteriorated by oxidation even when used at a high temperature of 200 ° C. or more, and has no drop of a conductive wire and a fluctuation of a resistance value. thing. SOLUTION: In a ceramic substrate for a semiconductor manufacturing / inspection apparatus in which a conductor composed of one or more circuits is formed on or in a surface of a ceramic substrate, a conductive wire is electrically connected to the conductor, A ceramic substrate for a semiconductor manufacturing / inspection apparatus, wherein at least a part of a connection part and a conductive line are coated with a non-oxidizing metal. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014186872-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020110954-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009188389-A |
| priorityDate | 2000-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.