| abstract |
PROBLEM TO BE SOLVED: To provide a photopolymerizable resin composition which can be developed with an alkaline aqueous solution excellent in sensitivity and resolution, resist line forming property, and resist stripping property. SOLUTION: (a) 20 to 90 parts by weight of a polymer having a carboxyl group in a side chain and a weight average molecular weight of 20,000 to 500,000; -Phenylglycine in an amount of 0.01 to 1 part by weight, (b-2) p-aminophenylketone or thioxanthone-based compound in 1 to 20 parts by weight, (c) a photopolymerizable resin composition comprising 1 to 50 parts by weight of a photopolymerizable polyfunctional unsaturated compound represented by the following general formula (1). Embedded image (Wherein, R 1 , R 2 , and R 3 are H or CH 3 , which may be the same or different. Also, 1, m, and n are positive integers of 0 to 3. .) |