http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001166482-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-26 |
| filingDate | 1999-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abf92c6162f276a54a5782dd87f205c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_011a1a34e0710f341a81c9dd1d273ea7 |
| publicationDate | 2001-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001166482-A |
| titleOfInvention | Positive photoresist composition |
| abstract | (57) [Problem] To provide a positive photoresist composition which has a high sensitivity and a high resolution, provides a rectangular resist pattern, has good wettability to a developer, and has few development defects. SOLUTION: A positive photoresist composition containing an acid-decomposable polymer containing a repeating unit of the formula (I) and a repeating unit of the formula (II) and having an increased solubility in an alkaline developer by the action of an acid ( In the formula, Y represents a hydrogen atom, a methyl group, a cyano group or a chlorine atom, and L and M represent a single bond or 2 R ′, R ″ and R ′ ″ are an alkyl group, a phenyl group, a trialkylsilyl group or a trialkylsilyloxy group, Ra is a hydrogen atom or an alkyl group, Z is a lactone together with a carbon atom to be bonded. Represents the group of atoms forming the structure). Embedded image |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6461788-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014085412-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6780563-B2 |
| priorityDate | 1999-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 309.