| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86df70be6baafcc380c5c26c307c005b |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C11-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G21-02 |
| filingDate |
1999-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_486410e4beda5dfe988319d59486a90a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef2d8fa5c2b5a9be6d31490e91dca6f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_129650f7ebe95c27721eab18b2df5794 |
| publicationDate |
2001-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2001072417-A |
| titleOfInvention |
Dielectric film, capacitor including the same, and random access memory including the same |
| abstract |
PROBLEM TO BE SOLVED: To provide a dielectric film capable of manufacturing a film having a film thickness of 0.5 μm or less and having a high dielectric constant at low cost, a capacitor including the same, and a random access memory including the same. I do. SOLUTION: The dielectric film has a composition containing Pb x Zr (1-y) Ti y O 3 and Li, and the value of x is 0.9 to 1. 3, the value of y is 0.3 to 0.7. The content of Li in the dielectric thin film is 0.001 to 20 mol% with respect to the content of Pb x Zr (1-y) Ti y O 3 , and the film thickness is 5%. 000Å or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005314631-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016066822-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004075424-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4688458-B2 |
| priorityDate |
1999-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |