http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001057351-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate | 1999-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8382f19a5bb23f13b53ac198ffadc45b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c5d56c6c033d9fd7b104c7056105aba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55376e1837da0b73561c2a0779c62c21 |
| publicationDate | 2001-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001057351-A |
| titleOfInvention | Aqueous dispersion for chemical mechanical polishing |
| abstract | (57) [Problem] To provide an aqueous dispersion for chemical mechanical polishing which can be polished at a sufficient speed without causing scratches or the like on a surface to be polished in polishing copper or the like. SOLUTION: An aqueous dispersion containing a polymer or a copolymer having a crosslinkable structure and having a functional group capable of forming a cation in its molecule, and water is obtained. The polymer having a functional group capable of forming a cation can be produced by polymerizing methyl methacrylate or the like using the azo polymerization initiator having the specific functional group. Further, it can also be produced by polymerizing methyl methacrylate or the like using the above polymerization initiator in the presence of polystyrene or the like. Further, a copolymer having a functional group capable of forming a cation is 3-amino- It can be produced by copolymerizing a monomer having a specific functional group such as 2-hydroxypropyl methacrylate with methyl methacrylate or the like. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004107429-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8075800-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007273680-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6800105-B2 |
| priorityDate | 1999-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 111.