http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001028366-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 1999-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcd41cef97f24d2ef67adf700586fecf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f49a383cd6197710acf8aa7206789ac2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff80a8ee8a4b091ee2f55ddee09ed264 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1df3f7d17803875152ce46f5e3b4251a |
| publicationDate | 2001-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2001028366-A |
| titleOfInvention | Silicon electrode plate |
| abstract | (57) [Problem] To provide a silicon electrode plate for a plasma etching apparatus used for manufacturing a semiconductor device, which can surely reduce the amount of generated particles. SOLUTION: A silicon electrode plate used as an upper electrode in a plasma etching apparatus is made of K 2 Cr 2 O 7 (5 %): Plasma etching in which the density of pits having a diameter of 0.5 μm or more and appearing on the surface is 5 pits / mm 2 or less when immersed in a liquid (Seco solution) of HF (50%) = 1: 2 for 3 minutes. Silicon electrode plate. The specific resistance of the silicon electrode plate material is preferably 1 Ω · cm or more and 50 Ω · cm or less. In order to prevent contamination from the packaging bag and / or the packaging case, one of polyethylene, polypropylene and polyethylene terephthalate is used as the material. In this case, the volume resistivity value of the packaging bag and / or the packaging case is preferably 1 × 10 4 to 9 × 10 18 Ω · cm. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008085027-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EA-015000-B1 |
| priorityDate | 1999-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.