| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-3435 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
1997-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2000-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000514246-A |
| titleOfInvention |
Dry etching method of transparent electrode in low pressure plasma reactor |
| abstract |
(57) Abstract: A method for dry etching an indium-tin oxide (ITO) layer deposited on a substrate in a low pressure plasma reactor is disclosed. The method comprises the steps of: placing a substrate having an ITO layer in a low-pressure plasma reactor; introducing an etching source gas into the low-pressure plasma reactor; A step of exciting the plasma and a step of etching the ITO layer with the plasma are included. |
| priorityDate |
1996-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |