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filingDate 1999-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74f5a689ad75026cd78a7574ca23e2af
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publicationDate 2000-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000321791-A
titleOfInvention Pattern forming method and positive resist composition
abstract (57) [Problem] To prevent a polymer aggregate from being exposed on a side wall of a pattern. SOLUTION: Radiation 4 is applied to a resist film formed by crosslinking a resist 2 around a polymer aggregate 1 existing in a positive resist with a crosslinking agent, thereby forming a pattern.
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