http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000321785-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f09378c018e7719f171f7e91f2dd60fd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
| filingDate | 1999-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e266f4cb3b8de826114f79c58113b74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_378b44534e70a70da05754a5a8ea9dc5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd5852efdbfe5a965dd83393e04e95ae |
| publicationDate | 2000-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000321785-A |
| titleOfInvention | Three-layer laminate film for pattern formation and pattern formation method |
| abstract | (57) [Summary] (With correction) [PROBLEMS] To provide a pattern forming method. SOLUTION: An energy-sensitive radiation coating layer (A), a filter layer (B) and a resin layer (C) for forming an energy-sensitive radiation insulating coating are sequentially laminated from an upper layer, and an upper layer of the coating layer (A) is formed. The energy ray is prepared so that the energy ray irradiated from the surface is absorbed and / or reflected by the filter layer (B) so as not to adversely affect the pattern formation of the underlying resin layer (C) for forming an energy-sensitive insulating film. A three-layer laminated film for forming a pattern, comprising a three-layer laminated film formed as described above. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011099259-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014032391-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4684707-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006039507-A |
| priorityDate | 1999-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 151.