| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00823c653968e3a68b83716db4a4e010 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F15-00 |
| filingDate |
1999-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22e4c1e518c0799500e359d92a3ed9e7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a6b549f3ff548431e14d01e897df8ee |
| publicationDate |
2000-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000309890-A |
| titleOfInvention |
Corrosion reduction method in corrosive gas supply system |
| abstract |
(57) [Problem] To provide a method for reducing corrosion in a corrosive gas supply system. SOLUTION: When opening a corrosive gas supply system composed of a flow path for flowing a corrosive gas, a device for introducing a corrosive gas, etc. to the atmosphere, baking equipment constituting the corrosive gas supply system. A gas purge is performed to release the corrosive gas adsorbed on the gas contact surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107002253-A |
| priorityDate |
1999-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |