| abstract |
(57) [Problem] To provide an organic EL device with good reproducibility. SOLUTION: In manufacturing an organic EL element having a transparent electrode, an organic layer including a light emitting layer, and a metal electrode on a substrate, a surface treatment is performed on an ITO transparent electrode formed on the substrate to form the ITO electrode. Improve the work function, cleanliness and flatness. Further, after the surface treatment, the substrate is carried into the measurement chamber 200 without being exposed to the atmosphere, where the cleanliness (XPS), flatness (AFM) and work function of the ITO electrode surface are measured. It is checked whether the measured cleanliness, flatness, and work function satisfy predetermined conditions. If the measured cleanliness, flatness, and work function satisfy the predetermined conditions, the substrate to be measured is not exposed to the atmosphere and the next organic layer forming chamber 3 is exposed. Then, an organic layer is formed on the surface of the transparent electrode that has been transferred to the surface of the transparent electrode after the surface treatment, and a metal electrode is further formed in the metal electrode forming chamber 400. |