abstract |
(57) [Problem] To provide a photosensitive composition capable of alkali development. (A) a polymer having a structural unit represented by the following general formula (1) as a main component; and (b) a polymer having the following general formula (2): A photosensitive resin precursor composition comprising a quinonediazide compound represented by the formula: Embedded image (R 1 in the general formula (1) represents a trivalent to octavalent organic group having at least 2 or more carbon atoms, and R 2 represents a divalent to hexavalent organic group having at least 2 or more carbon atoms. R 3 is hydrogen or an organic group having 1 to 10 carbon atoms, n is an integer of 10 to 100,000, m Is an integer from 1 to 2, and p and q are integers from 0 to 4. p and q never become 0 at the same time. ) (In the general formula (2), x is an integer from 0 to 2; Cannot be hydrogen atoms. ) |