http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000124198-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97f0fa258a008bf056ad04b7f380dda |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
| filingDate | 1998-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2261689ad377ef0bd99dd7a5af204765 |
| publicationDate | 2000-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000124198-A |
| titleOfInvention | Plasma etching apparatus and plasma etching method |
| abstract | PROBLEM TO BE SOLVED: To monitor an etching processing state at a high S / N ratio and detect an etching end point at a high S / N ratio. SOLUTION: In plasma etching, an etching gas is made different from an isotope composition ratio of a naturally occurring element, or an etching gas, an etching object, and the like are determined for at least one kind of element contained in a detection substance. The isotope composition ratio of the constituent elements is made different. By making the isotope composition ratio different, it is possible to cause a difference in the mass of a detection substance having the same atomic composition detected by mass spectrometry according to the stage of the etching treatment. By mass spectrometry, a detection substance obtained from an etching target and a detection substance obtained from a substance other than the etching target are separately detected, whereby a change in the etching target is detected without being affected by a noise signal. Is monitored at a high S / N ratio. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100397038-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007311444-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011040469-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015510683-A |
| priorityDate | 1998-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.