abstract |
(57) [Problem] To be developed in an aqueous solution in a short time without peeling, and high in sensitivity. SOLUTION: 100 parts by weight of a polyimide precursor and 0.1 to 5 of an organosilicon compound represented by the following general formula (Formula 1) 0 parts by weight. Here, R 9 represents a divalent organic group, 10 and R 11 each represent a group independently selected from an alkyl group, an alkenyl group and an aromatic group, and m is 1 -3. OCN-R 9 -Si (OR 10 ) m R 11 3-m ... |