http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000114607-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-12 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-12 |
| filingDate | 1999-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8df6caf3043d2c1e4d8720b0f332744c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8af91646d6bee17374489833d2ad6bcd |
| publicationDate | 2000-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000114607-A |
| titleOfInvention | Method of manufacturing an infrared sensor |
| abstract | (57) [Summary] [PROBLEMS] To enable a beam sensor to be manufactured with precisely reproducible characteristics, and to be capable of being arranged at a small interval independent of the thickness of a substrate used. A beam sensor with individual sensor elements can be manufactured. SOLUTION: At least one region 12 where an opening 4 is to be formed in a semiconductor substrate 1 is set on the surface of the semiconductor substrate. Next, a film 13 is deposited on the surface. Further, the beam absorber 5 is attached to the setting area 12 on the film 13. Further, a thermocouple 6 having a thermal contact that is in thermal contact with the beam absorber 5 and a cold junction 7 that is in thermal contact with the semiconductor substrate 1 is attached. In this case, openings are formed in the film 13 in the setting region 12, and the semiconductor substrate 1 is etched through the openings. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9006658-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9360373-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2778636-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011153889-A |
| priorityDate | 1998-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.