| abstract |
(57) [Problem] To provide a photosensitive resin composition capable of alkali development. SOLUTION: The positive type comprises (a) a polymer having a structural unit represented by the general formula (1) as a main component, and (b) a quinonediazide compound represented by the general formula (2). It is a photosensitive resin precursor composition. Embedded image (R1 is a trivalent having at least two or more carbon atoms) An octavalent organic group, R2 is a divalent to hexavalent organic group having at least 2 or more carbon atoms, and R3 is hydrogen or an organic group having 1 to 20 carbon atoms. n is 1 An integer from 0 to 100,000, m is an integer from 0 to 2, p and q show the integer of 0-4. p and q do not become 0 at the same time. ) (R4 is a heterocyclic ring containing 1 to 10 nitrogen atoms. B Represents an integer of 1 to 10. ) |