| abstract |
(57) [PROBLEMS] To provide different LDDs simultaneously on the same substrate. It is an object of the present invention to provide a method for manufacturing a highly productive TFT having a structure and a structure thereof. That is, the present invention provides a novel structure of a TFT and a manufacturing process with high productivity. SOLUTION: By using a heat-resistant Ta film or a film containing Ta as a main component as a wiring material and further covering with a protective layer, a heat treatment at a high temperature (400 to 700 ° C.) can be performed, In addition, by using the protective layer as an etching stopper, in the peripheral driving circuit portion, a TFT having an LDD structure by a self-alignment process (self-alignment) using the sidewall 126 is arranged, In the pixel matrix portion, an LDD by a non-self-alignment process (non-self-alignment) using the insulator 125 is used. Arrange TFT with structure |