| abstract |
Kind Code: A1 Abstract: A photo-acid generator for releasing a photo-acid initiator or a radical agent and a protecting group of an organic compound during polymer polymerization, particularly a photo-acid generator for a chemically amplified photoresist used for semiconductor materials. A novel sulfonium salt useful as an agent and a method for producing the same are provided. A perfluoroalkanesulfone anhydride is used without using a Grignard reagent. ydride) as a one-step reaction using sulfox ide) By reacting a compound with an aromatic compound, the following general formula (wherein Ra, Rb and Rc each independently represent an alkyl group, a cycloalkyl group, an aryl group, an allyl group, an aromatic group or a benzyl group Wherein n is an integer of 0 to 20). Embedded image |