http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000031136-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43ee55d23b83ae77d3b990af9481585e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate | 1998-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ca48c6d5e1916ac4b0617fa692849d |
| publicationDate | 2000-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2000031136-A |
| titleOfInvention | Protective member for plasma processing equipment |
| abstract | PROBLEM TO BE SOLVED: To provide plasma processing which is excellent in plasma resistance, effectively protects an inner wall of a plasma processing apparatus, reduces generation of particles due to wear of the inner wall, and is stable for a long period of time. To provide a protection member for a plasma processing apparatus which enables the following. [Constitution] 0.1 to 30% by weight of Si is uniformly dispersed and compounded at the atomic level in the glassy carbon structure, and the value of the average lattice spacing d 002 of the graphite hexagonal mesh layer is 0.340 to 0.3. A protective member for a plasma processing apparatus, which is formed from a Si-containing glassy carbon material having a structure of 80 nm. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007281150-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002029843-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007116940-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009076809-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101028605-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002029844-A |
| priorityDate | 1998-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.