| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cbffa3b81b3b862dc7220b5648f5f745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F226-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F230-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F230-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F226-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12 |
| filingDate |
1997-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ee604e547944b26255da2b091d9bbd2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecdc3073d730dd1015e8c03790d65117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09c9e62d2df2d54648aa9e0f8993728d |
| publicationDate |
1998-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
GB-2320500-A |
| titleOfInvention |
N-vinyl lactam copolymers; photoresist materials |
| abstract |
Copolymers containing N-vinyllactam derivatives protected at 3-position are provided and represented by the following formula. The copolymers are used as a photoresist material suitable for deep uv process so that high sensitivity and resolution can be obtained. In addition, ultrafine circuits can be formed and an exceptional improvement in PED stability can be accomplished by use of the photoresist. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013344439-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745077-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7923200-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10719014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008122884-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008122884-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6284863-B1 |
| priorityDate |
1996-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |