| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C17-389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C17-383
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2014-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fd5035e89678525c959d0ec4f3508c0 |
| publicationDate |
2018-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-3012241-B1 |
| titleOfInvention |
Plasma etching method with high-purity 1-fluorobutane |
| priorityDate |
2013-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |