http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2884523-A1

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filingDate 2013-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2884523-A1
titleOfInvention Method for activating a porous layer surface
abstract A method for activating an exposed surface (1) of a porous dielectric layer (2), nthe method comprising the steps of: nI. Filling with a first liquid (5) at least the pores (4) present in a part (10) of the porous dielectric layer (2), said part (10) comprising the exposed surface (1), nII. Removing the first liquid (5) selectively from the surface (1), nIII. Activating the exposed surface (1), and nIV. Removing the first liquid (5) from the bulk part (3) of the porous dielectric layer (2).
priorityDate 2013-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 29.