http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2770373-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_986d0ab29fa7910a46cd21a12d682fe4 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 2013-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c03cd10e25f9188e6e27536a85ff8039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37997fcb0836b7de36a0eeb1f4e8ef61 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a71d7f9c7884ca3b98f3c5966faf3df4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbba12a7701ac558470fe74539179356 |
| publicationDate | 2014-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2770373-A1 |
| titleOfInvention | Conformal anti-reflective coating |
| abstract | Method for performing an integrated circuit flow step, said method comprising providing a substrate (1) having a topography presenting a relief (2), providing an anti-reflective film (3) conformally on said substrate wherein said provision involves a Molecular Layer Deposition step, wherein said anti-reflective film (3) comprises at least an organic compound, eventually chemically bound to an inorganic compound, wherein the organic compound or the inorganic compound is bound to the substrate and wherein said organic compound absorbs light at at least one wavelength selected in the range 150-500 nm, and, providing a photoresist layer (4) over said anti-reflective film (3). |
| priorityDate | 2013-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.