| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a53ed73ada63e8d6cdcbc66c8e6095d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20207
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20214 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20 |
| filingDate |
2007-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_083c657463376465eac2857151f929f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77efbe498904335fb32ed4b98b6f705c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8dc68e5120f3b7839b1cb54cd8c57ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2157bb400f7bd30bdb0eb30ab6f21b35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_044df6ab9db8518e1f1d7b00edde4f59 |
| publicationDate |
2017-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-2747120-B1 |
| titleOfInvention |
Method of smoothing solid surface with gas cluster ion beam |
| priorityDate |
2006-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |