http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2362203-A2

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filingDate 2011-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c68ad57231d5335d74f533552608211
publicationDate 2011-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-2362203-A2
titleOfInvention Apparatus and method for minimizing drift of a piezo-resisitive pressure sensor due to the progressive release of mechanical stress over time
abstract An absolute piezo-resistive pressure sensor system and method employing multiple pressure sensing elements operating simultaneously to detect pressure. Both pressure sensing elements being subject to a common reference pressure within a sealed cavity. The first pressure sensing element detecting an offset voltage resulting from the progressive release of mechanical stress at an assembly interface between the sensing element and a base plate on which the sensing elements are assembled. Electronic circuitry compensates the pressure measured by the second pressure sensing element based on the offset voltage detected by the first pressure sensing element.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013074540-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11560302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022057970-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016334292-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10144636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018055161-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9983081-B2
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Total number of triples: 25.