http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2347438-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e6d67894a893256e5b4d85401e466143 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1868 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3003 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate | 2009-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b36449c5422332ccf79a5b26ae96bc1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8acfc21ffa48c303813ea304e08be5a |
| publicationDate | 2011-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2347438-A1 |
| titleOfInvention | Method of nonstoichiometric cvd dielectric film surface passivation for film roughness control |
| abstract | A method is provided for reducing film surface roughness in Chemical Vapor Deposition (CVD) of dielectric films. The method may include removing dangling bonds from a film surface of a CVD dielectric film by a reactant. For reducing a surface roughness of a dielectric film, a further method may passivate a nonstoichiometric film surface of the dielectric film, or of a previous dielectric film, or of the dielectric film and of a previous dielectric film, by a reaclant gas in the vapor environment. The dielectric film may include at least one out of the following group: ultraviolet light transparent Silicon Nitride (UVSIN), Silicon Rich Oxide (SRO), Silicon Dioxide (SiO 2 ), Silicon Nitride (Si 3 N 4 ), Phosphosilicate Glass (PSG), or Silicon Oxynitride (SiON). The reactant gas may include at least one out of the following group: Ammonia (NH 3 ), Hydrogen (H 2 ), Nitrous Oxide (N 2 O), or Oxygen (O 2 ). |
| priorityDate | 2008-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.