| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 |
| filingDate |
2001-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9eb6af1e5b46d575dd12f9825b66c845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4979ecf459acf88e84f16ab731505f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baf129d85fbb84e5ccfc739d69cf5c41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_255c934b51375c86e59f6cc49b42fd8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_049fca64e778420af85017a5b6c8f27d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e41f3ed3b052ba1ee33d3da1dbd544a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdb0a88a781c044a0afebd6dcb38ffc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d48e7869bb6a46df1977c761d40ed37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d181780dc7866eed0a2176e00c99ac46 |
| publicationDate |
2008-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1986215-A1 |
| titleOfInvention |
Substrate processing apparatus and substrate plating apparatus |
| abstract |
A substrate processing apparatus fills a metal such as copper or the like in fine interconnection patterns or trenches defined in a semiconductor substrate. The substrate processing apparatus has a loading/unloading unit for placing a substrate cassette to load and unload a substrate, a substrate treating unit for treating a substrate, and a transfer robot for transferring a substrate between the loading/unloading unit and the substrate treating unit. The loading/unloading unit, the substrate treating unit, and the transfer robot are installed in a single facility. The loading/unloading unit has a rotary table which is horizontally rotatable for positioning the substrate cassette in a position to detect the substrate cassette placed in the loading/unloading unit and to remove the substrate from the substrate cassette with the transfer robot. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105390426-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105390426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10186440-B2 |
| priorityDate |
2000-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |