| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2005-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25b889114b1704e306d4f91543b9c677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dc5f57826a230d204f5ff27595a5759
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ead02223880d953539d48a5d84fae4cf |
| publicationDate |
2006-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1619269-A2 |
| titleOfInvention |
Method for enhancing fluorine utilization |
| abstract |
A process for enhancing the fluorine utilization of a process gas that is used in the removal of an undesired substance from a substrate is disclosed herein. In one embodiment, there is provided a process for enhancing the fluorine utilization of a process gas comprising a fluorine source comprising: adding a hydrogen source to the process gas in an amount sufficient to provide a molar ratio ranging from about 0.01 to about 0.99 of hydrogen source to fluorine source. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102498581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008012665-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012178262-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007070116-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007070116-A3 |
| priorityDate |
2004-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |