| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K31-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16K35-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
2005-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b20532b3d741db4dbbdac416f58ae631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ead02223880d953539d48a5d84fae4cf |
| publicationDate |
2005-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1598881-A2 |
| titleOfInvention |
Method for removing a substance from a substrate using electron attachment |
| abstract |
A method for removing a substance from at least a portion of a substrate whichnmay be for example, a reactor or a semiconductor material, is disclosed herein. In onenaspect, there is provided a method comprising: providing a reactor having a surfacencoated with a substance; providing a first and second electrode in proximal to the reactornwherein the first and second electrode reside within a target area; passing a gas mixturencomprising a reactive gas into the target area; supplying energy to the first and/or thensecond electrodes to generate electrons within the target area wherein at least a portionnof the electrons attach to at least a portion of the reactive gas thereby forming annegatively charged cleaning gas; contacting the substance with the negatively chargedncleaning gas which reacts with the substance and forms a volatile product; and removingnthe volatile product from the reactor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007016631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007027350-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007027350-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106024849-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7674337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106024849-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008012665-A1 |
| priorityDate |
2004-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |