Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e96f3ee1454ffb6578f653ba5b9af958 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02 |
filingDate |
2003-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8907d68c16263bb7b17c02744c15b51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b7043a9a13ed9e1634ef28beb9f795d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7d712a956efe81ec75df411deebd71d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2c895721f2f3346604f988fd4393d33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24a5777709e4a9262be768182f12a807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4343f96c21b08898d437e1fb85e99c7d |
publicationDate |
2007-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
EP-1566416-A4 |
titleOfInvention |
LIQUID COATING FORMING AMORPHOUS SILICON COATING FILM HAVING A LOW DIELECTRIC CONSTANT AND METHOD FOR PRODUCING THE LIQUID COATING |
priorityDate |
2002-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |