| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e96f3ee1454ffb6578f653ba5b9af958 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2003-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2c895721f2f3346604f988fd4393d33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b7043a9a13ed9e1634ef28beb9f795d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24a5777709e4a9262be768182f12a807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8907d68c16263bb7b17c02744c15b51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4343f96c21b08898d437e1fb85e99c7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7d712a956efe81ec75df411deebd71d |
| publicationDate |
2006-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1564798-A4 |
| titleOfInvention |
METHOD FOR MANUFACTURING AMORPHOUS SILICONE COATING WITH LOW DIELECTRIC CONSTANT AND COATING THUS OBTAINED |
| priorityDate |
2002-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |