| abstract |
The present invention relates generally to a method and apparatus (200) for converting a precursor material (11), preferably organometallic, to a film, preferably metal-containing that is adherent to at least a portion of a substrate (10). Both method and apparatus include a pre-conversion step (420) or section (210), and a step (430) or section (215 )for substantial conversion of a portion of material from the pre-conversion step or section into the form of a predetermined pattern (440), where this substantial conversion results in a metal-containing patterned layers on the substrate (10). |