| abstract |
A positive sensitive composition comprises (A) a hydrolysing silane compound of formula (I), hydrolyzate, or condensation product thereof, (B) acid generator by light and (C) a basic compound. A positive sensitive composition comprises (A) a hydrolysing silane compound of formula (I), hydrolyzate, or condensation product thereof, (B) acid generator by light and (C) a basic compound; (R 1>) pSi(X) 4-p(I) R 1>1-12C non-hydrolysable organic group; X : hydrolysable group, and p : 0-3. Independent claims are also included for (1) a positive radio sensitive composition for light guide circuits comprising the composition, (2) a patter forming method by coating the composition on substrate, irradiating on desired positions and the removing the irradiated sections, (3) a light wave guide forming method by coating the composition on the substrate, and (4) the light guide obtained. |