| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_13aa7b32ae00ed83af7dfaa0b6a1f7c2 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-5096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 |
| filingDate |
2003-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab70ea1b8333eadef5322010c7781e0f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f9d721d474071bfc54859291a882072
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5796bf86f368043255e033a8f8f99b1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1cbf5580ac369302c4603df6dee9da1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43741cde7c1eee89e52ea600815a1166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd2cc237e35cb016f9a07f46214e50c |
| publicationDate |
2003-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-1344843-A2 |
| titleOfInvention |
Film forming method and substrate |
| abstract |
A film forming method comprising: supplying anreactive gas comprising a compound including a metal atomnbetween facing electrodes; arranging a substrate betweennthe electrodes; making the reactive gas in a plasma statenby applying a voltage between the electrodes undernatmospheric, pressure or under a pressure in a vicinity ofnthe atmospheric pressure and discharging; and forming anmetal film on a surface of the substrate by supplying anreducing gas having a reducing property into a plasmanatmosphere in which the reactive gas in the plasma statenexists. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107630203-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106319215-A |
| priorityDate |
2002-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |