http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1305639-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2e289a4daffd2c5fdc0b662b00ddf9e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01V1-181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01V1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 |
| filingDate | 2001-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee3dc2c4aa24917a0d884e258deb887d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc038a28753592e595fae68de6239f54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3410e8b10fdb161fec582a9150b0f7bf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c11972e04abadc73c01efd1b1b6e6c3a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8e9e4bd2605d487619f6d70f8ca96b2 |
| publicationDate | 2003-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-1305639-A1 |
| titleOfInvention | Accelerometer with re-entrant grooves |
| abstract | An accelerometer (305) which comprises a measurement mass assembly having top capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entrant opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) thereby lowering manufacturing costs and increasing production yields. |
| priorityDate | 2000-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.