| abstract |
Display devices such as EL elements or LED elements, orncolor filters, are provided, wherewith, when forming thinnfilms such as organic semiconductor films or colored resins,nthere is remarkably little variation in film thickness fromnpixel to pixel. When fabricating thin film elements havingnbanks of a prescribed height and a thin film layer formed bynan ink jet method in areas to be coated that are partitionednby those banks, if the width of the banks is made a (µm), thenheight thereof is made c (µm), the width of the areas to bencoated is made b (µm), and the diameter of the liquid dropletsnof the liquid material forming the thin film layer is made dn(µm), the banks are formed on the substrate so as to satisfynthe conditions that a > d/4, d/2 < b < 5d, c > t 0 (where t 0 n(µm) is the film thickness of the thin film layer), and c >n1/2 × d/b . Furthermore, banks are formed of an organicnmaterial on a bank formation surface configured of anninorganic material, plasma treatment is performed undernconditions that the induction gas is fluorine-based and thatnfluorine is present excessively, and the areas enclosed by thenbanks subjected to surface treatment are filled with thenliquid thin film material to form the thin film layer ornlayers. Also, immediately after performing an oxygen gasnplasma treatment on the substrate having the banks formed of |