| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 |
| filingDate |
1997-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0873750b5ddc9495ae3ba37e6c13c1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73f447e427e142b0614cd9ae99816738
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6068319f9279ed74d41db69dc719c517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11afba3cb21b2f665bb1b91dad62e33d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13155700824d30214c7d5d58c0ab4eb7 |
| publicationDate |
1997-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0803777-A1 |
| titleOfInvention |
Undercoating composition for photolithographic resist |
| abstract |
Proposed is a novel undercoating composition to form an undercoating layer interposed between the surface of a substrate and a photoresist layer with an object to decrease the adverse influences by the reflection of light on the substrate surface in the pattern-wise exposure of the photoresist layer to ultraviolet light without the undesirable phenomena of intermixing between layers and notching along with a large selectivity ratio in the etching rates between the patterned resist layer and the undercoating layer in a dry-etching treatment. The undercoating composition comprises (A) an ultraviolet absorber which is a benzophenone compound or an aromatic azomethine compound each having at least one unsubstituted or alkyl-substituted amino group on the aryl groups and (B) a crosslinking agent which is preferably a melamine compound having at least two methylol groups or alkoxymethyl groups bonded to the nitrogen atoms in a molecule in a weight proportion (A):(B) in the range from 1:1 to 1:10. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5948847-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101065707-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7163751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1492093-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1492093-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1298493-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100564985-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1298492-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7582360-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1326959-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1326960-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1298493-A2 |
| priorityDate |
1996-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |